High purity dense silicon carbide sintered body and process for

Stock material or miscellaneous articles – Composite – Of silicon containing

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75236, 501 89, 423345, 419 17, 419 48, 264 56, 4289122, B32B 1504

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054077508

ABSTRACT:
A high purity and high density silicon carbide sintered body is made by controlling an amount of aluminum in an aluminum compound as a sintering additive from more than the solid solution upper limit in silicon carbide, preferably, as aluminum from 0.4 to 0.7% by weight of the total silicon carbide and aluminum compound. The sintered body has a density of 99.9% or more and can have a smooth surface with an average surface roughness of 2 nm or less when polished. Thus, this sintered body is suitable for producing a precise, rigid and heat resistant mirror substrate.

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J. of the American Ceramics Society, vol. 39, No. 11, Dec. 1956, pp. 386-389, "Pressure Sintered Silicon Carbide", R. A. Allegro et al.

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