Stock material or miscellaneous articles – Self-sustaining carbon mass or layer with impregnant or...
Patent
1997-03-31
1998-09-01
Raimund, Christopher
Stock material or miscellaneous articles
Self-sustaining carbon mass or layer with impregnant or...
442179, 117 13, 117208, B32B 900
Patent
active
058009248
ABSTRACT:
A Czochralski process furnace component is disclosed. The component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy. A process for producing the components includes heat treatment of the carbon fiber and the components.
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Raimund Christopher
SGL Carbon Composites, Inc.
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