Fluid sprinkling – spraying – and diffusing – With heating or cooling means for the system or system fluid – Heating means
Patent
1992-09-04
1994-07-05
Breneman, R. Bruce
Fluid sprinkling, spraying, and diffusing
With heating or cooling means for the system or system fluid
Heating means
239DIG19, 134902, B05B 124
Patent
active
053260350
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
The present invention relates to a cleaning process now being employed in, for instance, the electronics industry centering around the semiconductor industry, and the optical equipment industry, and a method of cleaning under high temperature and high pressure and cleaning equipment to be used in a cleaning process for parts and components used in the industries.
BACKGROUND OF THE INVENTION
Cleaning has been carried out in every industry, and various devices have been carried out according to the purpose and characteristics of each cleaning process such as degreasing.
In association with sophistication of industrial technologies in recent years, development of a cleaning technology to realize higher purity is now strongly required. Also problems of pollution and contamination due to industrial effluents have occurred in recent years, and especially destruction of environment by Freon or trichloroethylene used in degreasing processes has caused a serious social problem, and now officials of the government institutions taking charge of the problems are investigating the possibility of prohibiting the use of these chemicals.
However, these chemicals are indispensable for the current cleaning process, and also development of an alternative cleaning technology is an urgent necessity.
Typical spray cleaning with high temperature/high pressure water is generally carried out in the apparatus as shown in FIG. 5, and description is made hereinafter for spray cleaning with high temperature/high pressure water with reference to FIG. 5.
A purpose of spray cleaning with high temperature/high pressure water is to completely remove impurities from a surface to be cleaned. In FIG. 5, water supplied to a water tank 102 by a cleaning water supply pipe 101 is pressurized by a compressing pump 103, heated by a heating device 104, injected as spray by a nozzle 106, and used for cleaning. When injected, the cleaning water should have, for instance, a temperature of 60.degree. C. or more and a pressure of kg/cm.sup.2 or more. This method is an effective one to remove contamination of a surface of a matter to be cleaned with a physical force of injected water.
In this case, the water supplied by the cleaning water supply pipe 101 is generally city water or pure water having a relative resistance of 1 to several Ma-cm, and in FIG. 5 the piping 101 is connected to a water service pipe.
However, even if cleaning of a material to be cleaned is carried out by employing the technology as described above, it is not always possible to completely remove contamination from a surface of the matter.
For instance, if we leave a fingerprint and machine oil on a surface of a matter to be cleaned and clean the matter to be cleaned with the fingerprint and machine oil left on it by applying the above technology, the fingerprint and machine oil are not removed completely and remain on the surface of the matter.
Namely, a cleaning effect in the aforesaid technology is not excellent.
An object of this invention is to provide a method of cleaning under high temperature and high pressure and cleaning equipment, both having an excellent effect.
SUMMARY OF THE INVENTION
The method of cleaning under high temperature and high pressure according to the present invention to achieve the object as described above is characterized in that cleaning is carried out by injecting ultrapure water having a relative resistance of 17.0 M.OMEGA.-cm or more when converted at a temperature of 25.degree. C. to the matter to be cleaned.
The high temperature/high pressure cleaning equipment according to the present invention to achieve the object as described above is characterized in that the cleaning equipment functions to inject high temperature/high pressure pure water from a nozzle to the matter to be cleaned in cleaning equipment which has at least a compressing pump, a heating device, a nozzle, and piping, and injects high temperature/high pressure water from the nozzle to the matter to be cleaned.
Description is made hereinafter for
REFERENCES:
patent: 3870033 (1975-03-01), Faylor et al.
patent: 4092176 (1978-05-01), Kozai et al.
patent: 4239661 (1980-12-01), Muraoka et al.
patent: 4832753 (1989-05-01), Cherry et al.
IBM Technical Disclosure Bulletin; "Process Equipment Cleaning with Ultrapure Steam" vol. 28, No. 8 (Jan. 1979).
Kawakami Michiya
Ohmi Tadahiro
Ohwada Makoto
Takahara Kiyoshi
Yagi Yasuyuki
Breneman R. Bruce
Dunn Jr. Thomas G.
Ohmi Tadahiro
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