High purity chemical delivery system

Details High purity chemical delivery system High purity chemical delivery system

2007-04-03

2007-04-03

Keasel, Eric (Department: 3753)

Fluid handling

Diverse fluid containing pressure systems

Gas pressure storage over or displacement of liquid

C137S240000

Reexamination Certificate

active

11055225

ABSTRACT:
A high purity chemical delivery system is provided that connects a high purity chemical container to a high purity chemical utilization point and that comprises three manifolds, each of the manifolds having a plurality of diaphragm valves. The inventive system enables rapid clean out and purge after the container is replaced by means of a plurality of vacuum and purge cycles, which remove residual chemical and entrapped impurities while reduced manufacturing downtimes compared with systems in the prior art.

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