High purity carbon/carbon composite useful as a crucible suscept

Details High purity carbon/carbon composite useful as a crucible suscept High purity carbon/carbon composite useful as a crucible suscept

1997-06-03

1999-01-12

Raimund, Christopher

Stock material or miscellaneous articles

Hollow or container type article

428408, 442179, 117 13, 117200, B29D 2200

Patent

active

058584862

ABSTRACT:
A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a total level of metal impurity below about 10 ppm, preferably below about 5 ppm, and most preferably having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy for the metals Ag, Al, Ba, Be, Ca, Cd, Co, Cr, Cu, K, Mg, Mn, Mo, Na, Ni, P, Pb, Sr and Zn. A crucible susceptor for a crystal growing process for pulling a crystal ingot from a crystal material melt in a crucible comprises a high purity composite comprising a two dimensional, continuously woven carbon fiber fabric reinforced carbon matrix; the high purity composite having a total level of metal impurity less than about 10 parts per million; the crucible susceptor being a one piece, ply lay-up structure of said high purity composite, having a side ring and a base, said side ring and said base having substantially the same thickness.

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