Drying and gas or vapor contact with solids – Process – With contacting of material treated with solid or liquid agent
Patent
1993-04-16
1994-11-01
Gromada, Denise L.
Drying and gas or vapor contact with solids
Process
With contacting of material treated with solid or liquid agent
34 92, 34404, 34410, 34412, 34472, 34559, 622383, F26B 300
Patent
active
053597877
ABSTRACT:
An apparatus and method are described for delivering hygroscopic, corrosive chemicals such as hydrogen chloride from a source such as a tube trailer to a use point such as a semiconductor fabrication tool minimizing infiltration of moisture, and entrainment of particulates, while still reducing moisture contents below 100 parts per billion and achieving appropriate pressure drops without two phase flow.
REFERENCES:
patent: 4532778 (1985-08-01), Clark et al.
patent: 4853148 (1989-08-01), Tom et al.
patent: 5137047 (1992-08-01), George
patent: 5148945 (1992-09-01), Geatz
Bhaaha, et al.; "Joule-Thomson Expansion and Corrosion in HCL System"; Solid State Technology; Jul. 1992; pp. 53-57.
Chowdhury Naser M.
Mostowy, Jr. Lewis J.
Air Products and Chemicals Inc.
Chase Geoffrey L.
Gromada Denise L.
Marsh William F.
Simmons James C.
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