High pressure water stream to separate a multi-layer integrated

Metal working – Method of mechanical manufacture – Disassembling

Patent

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Details

294264, 294265, 29762, 438 4, 438 15, 438460, H01L 2144

Patent

active

061193259

ABSTRACT:
Aspects for device and package separation of a multi-layer integrated circuit device attached at a frontside to an integrated circuit package are described. In an exemplary method aspect, the method includes slicing through material coupling the multi-layer integrated circuit to the integrated circuit package with a high power water stream. The slicing further includes cutting through solder bump material. Additionally, the multi-layer integrated circuit device is utilized for device analysis from a frontside following separation from the integrated circuit package by the step of slicing.

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