High pressure quartz glass bubbler ampoule and assembly

Details High pressure quartz glass bubbler ampoule and assembly High pressure quartz glass bubbler ampoule and assembly

1999-08-17

2000-04-04

Bushey, C. Scott

Gas and liquid contact apparatus

Fluid distribution

Contact receptacle

2611211, 2065246, B01F 304

Patent

active

060451254

ABSTRACT:
A bubbler ampoule and bubbler assembly for containing highly corrosive chemicals is configured so as to provide enhanced strength which allows safe transport and usage of high vapor pressure chemicals. The enhanced assembly strength is provided by controlling the ratio of the bottom wall thickness to the side wall thickness of the ampoule; and by providing properly radiused corners on the ampoule.

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Pete Singer, Senior Editor, Semiconductor International, Trends in Liquid Sources, pp. 92-97, Jun. 1993.

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