High pressure, non-logical thermal equilibrium arc plasma genera

Details High pressure, non-logical thermal equilibrium arc plasma genera High pressure, non-logical thermal equilibrium arc plasma genera

1981-07-14

1985-08-20

Paschall, M. H.

Electric heating

Metal heating

By arc

219121PL, 219121PM, 427 34, 427 38, 31323151, B23K 900, B05D 108

Patent

active

045366403

ABSTRACT:
An apparatus for deposition of coatings upon substrates generates a non-local thermal equilibrium arc plasma at the relatively high pressure of at least approximately 1 atmosphere. A closed chamber (25) is defined by a cylindrical anode (11) and annular housings (21, 22) carrying transparent end plates (23, 24). A pencil-shaped cathode (12) is passed through one end plate (23 or 24) coaxially into chamber (25) so that its tapered end (20) is spatially proximate to an exit orifice (44) centrally located in anode (11). Gas ports (30, 31) permit the introduction of a preselected gaseous environment at the desired pressure into chamber (25). A low-current arc is struck between anode (11) and cathode (12) establishing the desired plasma. Two coils (33, 34) are coaxially placed radially outward of both ends of the chamber in a Helmholtz coil configuration to generate a uniform magnetic field in chamber (25) and induce rotation of the arc plasma. The coating material is introduced into the plasma as by a reservoir (40) in cathode (12) and its excited species ejected through exit orifice (44) in a plasma jet for deposition upon any substrate adjacent thereto.

REFERENCES:
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patent: 3998718 (1976-12-01), Melliar-Smith
patent: 4101411 (1978-07-01), Suzuki et al.
patent: 4115184 (1978-09-01), Poulsen
patent: 4277304 (1981-07-01), Horiike et al.
patent: 4328257 (1982-05-01), Muehlberger et al.

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