High-pressure fluidized bed reactor for preparing granular...

Chemical apparatus and process disinfecting – deodorizing – preser – Control element responsive to a sensed operating condition – Control element is fluid pressure sensitive

Reexamination Certificate

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Details

C422S129000, C422S139000, C422S140000, C422S142000, C422S143000, C422S145000, C423S348000, C423S349000

Reexamination Certificate

active

07972562

ABSTRACT:
The present invention relates to a high-pressure fluidized bed reactor for preparing granular polycrystalline silicon, comprising (a) a reactor tube, (b) a reactor shell encompassing the reactor tube, (c) an inner zone formed within the reactor tube, where a silicon particle bed is formed and silicon deposition occurs, and an outer zone formed in between the reactor shell and the reactor tube, which is maintained under the inert gas atmosphere, and (d) a controlling means to keep the difference between pressures in the inner zone and the outer zone being maintained within the range of 0 to 1 bar, thereby enabling to maintain physical stability of the reactor tube and efficiently prepare granular polycrystalline silicon even at relatively high reaction pressure.

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patent: 199 48 395 (2001-05-01), None
patent: WO 96/41036 (1996-12-01), None

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