High precision z-theta stage

Details High precision z-theta stage High precision z-theta stage

2006-09-12

2006-09-12

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C219S121670

Reexamination Certificate

active

07105956

ABSTRACT:
A high precision z-theta stage having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprises parallel spaced apart linear translation stages, a carriage supported between the parallel translation stages, and a rotation stage carried by the carriage between the parallel translation stages. Each brushless linear motor is connected to the carriage to apply translation forces in a horizontal plane intersecting the vertical center of gravity.

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patent: 6927838 (2005-08-01), Ono et al.

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