High precision positioning device

Details High precision positioning device High precision positioning device

1978-12-18

1980-11-18

Watson, Robert C.

Work holders

Holder mounted for movement

With plural means for changing holder positions

B23Q 102

Patent

active

042341752

ABSTRACT:
An high precision positioning device, wherein a stage is supported for parallel movement relative to a guide member by an air bearing. If the position of the stage along a certain direction is not the desired position, the balance of the supply air pressure of a nozzle for supply air in said certain direction is changed to change the position of the stage to the desired position, thereby effecting high precision positioning of the order of micron.

REFERENCES:
patent: 3271086 (1966-09-01), Deffrenne
patent: 3813789 (1974-06-01), Shelton
patent: 4129291 (1978-12-01), Kato et al.

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