High precision mount

Details High precision mount High precision mount

1997-04-02

1999-02-16

Berman, Jack I.

Radiant energy

Source supports

347238, 347242, 347245, 347257, B41J 247

Patent

active

058723676

ABSTRACT:
A stable mount for mounting a narrow bandwidth beam generating source such as a laser or electron beam. The mount places two such devices in substantially vertical alignment with each other. One of the sources is completely adjustable with respect to the other. The device is especially suitable for the imaging field where it is desired to couple two laser heads each having one or a multiple of individual laser beams. The laser heads formerly subjected to mechanical vibration and temperature induced drift, can now be precisely located, adjusted and stabilized one to the next. This allows for increased job throughput without sacrificing the fidelity or macroscopic quality of the resulting image. The device is also suitable for use in photo microlithography where precise alignment is critical.

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patent: 5566277 (1996-10-01), Hideshima et al.
patent: 5717451 (1998-02-01), Katano et al.

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