High precision mirror, and a method of making it

Optical: systems and elements – Mirror – With support

Reexamination Certificate

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Details

C359S884000

Reexamination Certificate

active

06921177

ABSTRACT:
A mirror includes: a substrate having a surface; and a thin-film finish layer provided over the surface of the substrate and having on a side thereof opposite from the substrate a surface with a polished finish. According to a different aspect of the invention, a method of making a mirror includes: providing a substrate having a surface thereon; forming a thin-film finish layer over the surface of the substrate using thin-film techniques, the finish layer having a surface on a side thereof opposite from the substrate; and polishing the surface of the finish layer.

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patent: 6495272 (2002-12-01), Guttin
patent: 6587263 (2003-07-01), Iacovangelo et al.
patent: 6598985 (2003-07-01), Hagelin et al.
patent: 0456488 (1991-11-01), None

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