High precision location measuring device wherein a position dete

Details High precision location measuring device wherein a position dete High precision location measuring device wherein a position dete

1992-12-08

1994-11-29

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, G01B 902

Patent

active

053694880

ABSTRACT:
A high precision coordinate measuring device comprising a reflecting mirror fixed to a base, a movable holder displaceable in a direction perpendicular to the reflecting mirror, a position detector mounted on the movable holder and an interferometer for detecting a displacement of the position detector relative to the reflecting mirror. The interferometer has a measuring optical system and a reference optical system. This coordinate measuring device uses movable members light in weights thereof and permits performing measurements of lengths with high precision free from Abbe's error.

REFERENCES:
patent: 4984891 (1991-01-01), Miyazaki et al.

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