Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-05-05
2008-08-19
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S521000, C250S23700G
Reexamination Certificate
active
07414730
ABSTRACT:
Measurement of a distance change between a reference surface and a target is provided. A substrate has a first surface facing the target and including a grating. The grating and target combine to form an optical interferometer responsive to changes in distance between the grating and the target. A second surface of the substrate coincides with the reference surface and faces away from the target. Thickness information pertaining to the substrate is combined with results from the optical interferometer to provide a measurement of distance change between reference surface and target. The substrate is preferably a rigid material having picometer level dimensional stability.
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Allen Graham S.
Byer Robert L.
Sun Ke-Xun
Connolly Patrick J
Lumen Patent Firm, Inc.
The Board of Trustees of the Leland Stanford Junior University
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