Measuring and testing – Inspecting
Reexamination Certificate
2006-11-21
2006-11-21
Williams, Hezron (Department: 2856)
Measuring and testing
Inspecting
C198S502300, C414S222020, C414S222040
Reexamination Certificate
active
07137309
ABSTRACT:
A modular split-axis stage is used to inspect and/or repair large flat glass media suitable for LCD/TFT applications. Low-precision air table sections are detachably mounted to a centrally located, high-precision granite inspection/repair section. Glass media held by a vacuum contact is transported on air cushions from the up-web air table to the central inspection/repair section. Vacuum nozzles integrated with porous medium pads precisely control the height of the flexible media above the central section during inspection or repair. Embodiments includes structures in which the media is either stationary or moving during inspection/repair. A first media can be loaded/unloaded while a second media is undergoing inspection or repair in a pipelined operational mode.
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“Arraychecker 3000” to PhotonDynamics, available on the Internet at <http://www.photondynamics.com>.
“Arraychecker 3500” to PhotonDynamics, available on the Internet at <http://www.photondynamics.com>.
Baldwin David
Ghelman Eduardo
Saranli Afsar
Weiss Adam
Photon Dynamics, Inc.
Rogers David A.
Williams Hezron
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