High-power vertical cavity surface emitting laser cluster

Coherent light generators – Particular temperature control – Heat sink

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372 96, 372 72, 372 45, 385 89, 437129, H01S 304, H01S 308, H01S 3093, G02B 636

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058125710

ABSTRACT:
A laser cluster for high-power applications includes an array of VCSELs. The array of VCSELs includes a center VCSEL and one or more peripheral VCSELs displaced from the center VCSEL in a hexagonal closest-packing arrangement sharing a pair of common electrical contacts. Each VCSEL in the array is flip-chip mounted on a heat sink to present the backside of the VCSEL. A multimode optical fiber is coupled to receive laser light from the array of VCSELs. The array of VCSELs is operable to generate a laser burst at a wavelength in a range from 950 nm to 1050 nm. In a process for fabricating a VCSEL that can be clustered for high-power applications, a bottom n-doped mirror stack is deposited above an n-doped gallium arsenide substrate. An active region including indium gallium arsenide is deposited above the bottom mirror stack. A top p-doped mirror stack is deposited above the active region. Electrical contacts are applied to the top mirror stack and to the substrate. The laser cluster is packaged and sealed.

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