High power surface acoustic wave devices having copper and titan

Oscillators – Solid state active element oscillator – Significant distributed parameter resonator

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310313A, 310313B, 310313D, 310363, 333154, 333193, 333195, H01L 4104, H03B 532, H03H 9145

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active

050399578

ABSTRACT:
A surface acoustic wave device having interdigitated transducers comprised of an improved metalization system including copper and titanium doped aluminum transducers. A method of producing the interdigitated transducers includes deposition of the metals on a quartz substrate and subsequent heat treatment. The metalization system provides SAW devices having improved long-term frequency stability, particularly when operated at high power levels. The surface acoustic wave device may be incorporated in a feedback loop of an amplifier to form an oscillator circuit.

REFERENCES:
patent: 4422055 (1983-12-01), Cullen et al.
patent: 4639697 (1987-01-01), Yarranton et al.
patent: 4775814 (1988-10-01), Yuhara et al.
Yamada, J. et al. "Sputtered Al-Ti Electrodes For High Power Durable SAW Devices", Proceedings of the IEEE Ultrasonics Symposium, Oct. 2-5, 1988, vol. I, pp. 285-290.
Yuhara, A. et al., "Sputter Deposition for High Power Durable SAW Electrodes", Proceedings of 8th Symp. on Ultrasonic Electronics, Tokyo, Dec. 1987 Japanese Journal of Applied Physics, vol. 27, Supp. 27-1, pp. 172-174.
Hosaka, N. et al., "A Study of Al-Alloy Electrodes for High Power SAW Filters", Proceedings of 8th Symposium on Ultrasonic Electronics, Tokyo Dec. 1987 Japanese Journal of Applied Physics, vol. 27 (1988) Supplement 27-1, pp. 175-177.

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