High power surface acoustic wave devices having copper and titan

Details High power surface acoustic wave devices having copper and titan High power surface acoustic wave devices having copper and titan

1990-05-07

1991-08-13

Grimm, Siegfried H.

Oscillators

Solid state active element oscillator

Significant distributed parameter resonator

310313A, 310313B, 310313D, 310363, 333154, 333193, 333195, H01L 4104, H03B 532, H03H 9145

Patent

active

050399578

ABSTRACT:
A surface acoustic wave device having interdigitated transducers comprised of an improved metalization system including copper and titanium doped aluminum transducers. A method of producing the interdigitated transducers includes deposition of the metals on a quartz substrate and subsequent heat treatment. The metalization system provides SAW devices having improved long-term frequency stability, particularly when operated at high power levels. The surface acoustic wave device may be incorporated in a feedback loop of an amplifier to form an oscillator circuit.

REFERENCES:
patent: 4422055 (1983-12-01), Cullen et al.
patent: 4639697 (1987-01-01), Yarranton et al.
patent: 4775814 (1988-10-01), Yuhara et al.
Yamada, J. et al. "Sputtered Al-Ti Electrodes For High Power Durable SAW Devices", Proceedings of the IEEE Ultrasonics Symposium, Oct. 2-5, 1988, vol. I, pp. 285-290.
Yuhara, A. et al., "Sputter Deposition for High Power Durable SAW Electrodes", Proceedings of 8th Symp. on Ultrasonic Electronics, Tokyo, Dec. 1987 Japanese Journal of Applied Physics, vol. 27, Supp. 27-1, pp. 172-174.
Hosaka, N. et al., "A Study of Al-Alloy Electrodes for High Power SAW Filters", Proceedings of 8th Symposium on Ultrasonic Electronics, Tokyo Dec. 1987 Japanese Journal of Applied Physics, vol. 27 (1988) Supplement 27-1, pp. 175-177.

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