High power semiconductor laser device and method for fabricating

Coherent light generators – Particular active media – Semiconductor

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372 23, 372 45, 372 50, 437129, H01S 319

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active

060288760

ABSTRACT:
The present invention relates to high power semiconductor laser device and method for fabricating the same utilizing ion implanting process, by which a beam steering phenomenon of an optical output due to filaments is eliminated. This elimination is achieved by a periodically varying gain given for a resonator of the semiconductor laser device. That is, this invention changes a gain distribution which causes the generation of filaments in the resonator into different distribution. According to the present invention, there is formed an insulation layer through ion implantation to an active layer to adjust current density implanted to the active layer, thereby eliminating non-uniform distribution of the light along the longitudinal direction of the resonator.

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James Guthrie et al., "Beam Instability in 980-nm Power Lasers: Experiment and Analysis", IEEE Photonics Technology Letters, vol. 6, No. 12, Dec. 1994, pp. 1409-1411.

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