High power microwave plasma applicator

Details High power microwave plasma applicator High power microwave plasma applicator

1996-03-29

1999-04-20

Russel, Jeffrey E.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118723ME, C23F 102, H01J 724, H05H 124

Patent

active

058955488

ABSTRACT:
A plasma applicator including a cylindrically-shaped outer tube; a cylindrically-shaped plasma tube located within and concentric with the outer tube, and having a first end and a second end; a first support located at the first end of the plasma tube; a seal surrounding the plasma tube at its first end, compressed between the plasma tube and the first support, and located at a first distance from the first end of the plasma tube; and a shield extending a second distance into the plasma tube.

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European Search Report dated May 28, 1996.
Schlie, "Hydraulic fluid as a liquid coolant of high power, cw microwave (2.45 GHz) plasma tubes," Rev. Sci. Instrum. 62:542-543 (Feb. 1991).
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