High power laser flat panel workpiece treatment system...

Details High power laser flat panel workpiece treatment system... High power laser flat panel workpiece treatment system...

2007-05-21

2010-12-07

Bahta, Kidest (Department: 2123)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S120000

Reexamination Certificate

active

07848835

ABSTRACT:
A pulsed DUV workpiece treatment apparatus and method for delivering light to irradiate the workpiece, for crystallization of a material on the workpiece, carried on a work stage, which may comprise a pulsed laser DUV light source and an optical train producing a very narrow width very elongated beam of light pulses with a set of parameters required to be maintained within a respective selected narrow range of values on a pulse to pulse basis is disclosed, which may comprise: a laser controller; a work stage controller; a system controller receiving process recipe control demands from a customer recipe control command generator and providing control signals to the laser controller and the workstage controller, which may comprise: a database driven process controller which may comprise: a database containing generic process command steps selectable by a user through an external process user interface.

REFERENCES:
patent: 6115107 (2000-09-01), Nishi
patent: 6323589 (2001-11-01), Inoue et al.
patent: 6841033 (2005-01-01), Condrashoff et al.
patent: 6894826 (2005-05-01), Doi
patent: 7009140 (2006-03-01), Partio et al.
patent: 7039086 (2006-05-01), Fallon et al.
patent: 7061959 (2006-06-01), Partlo et al.
patent: 7167499 (2007-01-01), Das et al.
patent: 7193295 (2007-03-01), Dolechek et al.
patent: 7277188 (2007-10-01), Das et al.
patent: 2005/0226301 (2005-10-01), Partlo et al.

Affiliated with

Also associated with

Rating

High power laser flat panel workpiece treatment system... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High power laser flat panel workpiece treatment system..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High power laser flat panel workpiece treatment system... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4187994