Optical: systems and elements – Optical amplifier – Dispersion compensation
Patent
1992-09-22
1993-08-24
Moskowitz, Nelson
Optical: systems and elements
Optical amplifier
Dispersion compensation
359348, 372 30, 372 94, H01S 398, H01S 3093
Patent
active
052394085
ABSTRACT:
A regenerative laser amplifier system generates high peak power and high energy per pulse output beams enabling generation of X-rays used in X-ray lithography for manufacturing integrated circuits. The laser amplifier includes a ring shaped optical path with a limited number of components including a polarizer, a passive 90 degree phase rotator, a plurality of mirrors, a relay telescope, and a gain medium, the components being placed close to the image plane of the relay telescope to reduce diffraction or phase perturbations in order to limit high peak intensity spiking. In the ring, the beam makes two passes through the gain medium for each transit of the optical path to increase the amplifier gain to loss ratio. A beam input into the ring makes two passes around the ring, is diverted into an SBS phase conjugator and proceeds out of the SBS phase conjugator back through the ring in an equal but opposite direction for two passes, further reducing phase perturbations. A master oscillator inputs the beam through an isolation cell (Faraday or Pockels) which transmits the beam into the ring without polarization rotation. The isolation cell rotates polarization only in beams proceeding out of the ring to direct the beams out of the amplifier. The diffraction limited quality of the input beam is preserved in the amplifier so that a high power output beam having nearly the same diffraction limited quality is produced.
REFERENCES:
patent: 4191928 (1980-03-01), Emmett
patent: 4725787 (1988-02-01), Chandra
patent: 4943782 (1990-07-01), Stephens et al.
patent: 4989216 (1991-01-01), Chandra et al.
patent: 5022033 (1991-06-01), Hackell
Manes et al; Proceedings of the Laser Materials Processing; Nov,. 9, 1990 LIA, vol. 71, pp. 100-122; Abst. only provided.
(B) Ledneva et al; J. Appl. Spectrosc., vol. 36, #3, pp. 299-303, Mar. 1982, Abst only provided.
Dane et al; Proc. of SPIE, vol. 1626, pp. 297-307, Abst. only provided herewith.
Hachel et al.; DOE Conf. on Laser and Electro-Optic., May 25, 1990, 2 pages; Abst. only supplied.
Armandillo, E.; Regenerative Amplification In A XeCl Excimer Laser With A Phase-Conjugating Brillouin Mirror; Optics Communications, vol. 49, No. 3, Mar. 1, 1984, pp. 198-200.
Park et al.; Electronic Linewidth Narrowing Method For Single Axial Mode Operation Of Q-Switched Nd:YAG Lasers; Optics Communications, vol. 37,No. 6, Jun. 15, 1981, pp. 411-416.
Pashinin, et al.; Regenerative YAG:Nd.sup.3+ Amplifier With A Stimulated Brillouin Scattering Mirror; Sov. J. Quantum Electron., 18 (9), Sep. 1988, pp. 1092-1094.
Summers, et al.; Design and Performance Of A High Average Power Zigzag Slab Laser; Amosa (Optical Society of America); 1989 Annual Meeting, Technical Digest, Oct. 15-20 1989, p. 230.
Weaver, et al.; Multikilowatt Pockels Cell For High Average Power Laser Systems, J. Appl. Phys. 68 (6), Sep. 15, 1990 pp. 2589-2598.
Yan, et al.; High-Repetition-Rate Nd:Phosphate Glass Regenerative Amplifier, Conference on Lasers and Electro-Optics, Apr. 26, to May 1, 1987, OSA/IEEE, Digest of Technical Papers, pp. 150-151.
Dane Clifford B.
Hackel Lloyd A.
Moskowitz Nelson
Regents of the University of California
Sartorio Henry P.
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