High power chip scale package

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package

Reexamination Certificate

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C174S262000, C174S263000, C174S264000, C174S265000, C174S266000, C361S792000, C361S793000, C361S794000, C361S795000, C257S678000, C257S684000, C257S692000, C257S758000, C257S774000, C257S775000

Reexamination Certificate

active

06768189

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates generally to a process for packaging integrated circuits and, more particularly, to a packaging process that eliminates lead frame structures and wire bonds, and allows testing while the integrated circuit is still in wafer format.
2. Discussion of the Related Art
As is well understood in the art, many integrated circuit chips are patterned and formed together on an integrated circuit wafer. The wafer may be 3-15 inches in diameter, and include hundreds or thousands of integrated circuit chips symmetrically disposed in a matrix configuration on the wafer depending on the circuit complexity. Once the integrated circuit chips are fabricated, the wafer is cut between the integrated circuit chips to separate the chips from the wafer. The chips are then tested for performance.
Once the integrated circuit chip is separated from the wafer, it is sometimes packaged in a packaging assembly that provides environmental protection and the like. Generally, the integrated circuit chip is mounted to a metallized ground plane to provide a ground reference and thermal coupling to remove heat from the integrated circuit chip. A lead frame is mounted to the assembly to provide power, signal and ground connections to other circuit elements outside of the package. Wire bonds are used to provide electrical connections between the lead frame and the chip, and between the lead frame and the ground plane. However, the wire bonds cause parasitic inductances and capacitances that compromise performance of the integrated circuit, especially at high frequencies.
FIG. 1
is a cross-sectional view of a packaging assembly
10
for packaging an integrated circuit chip
12
of the type discussed above. The integrated circuit chip
12
is mounted to a back-side ground plane
14
by a thermally and electrically conductive attachment layer
16
, such as solder. The ground plane
14
is mounted to a die paddle
18
associated with a lead frame
20
. The lead frame
20
includes a plurality of separate leads
24
that are electrically isolated from each other and from the die paddle
18
. The leads
24
provide signal and power connections to the integrated circuit chip
12
from other circuit elements and systems. Metal traces
26
are deposited on top of the leads
24
within the packaging assembly
10
to provide a good electrical contact thereto. Signal wire bonds
28
are electrically connected to the traces
26
and to the chip
12
to make electrical connections thereto. Additionally, ground wire bonds
30
are electrically coupled to the ground plane
14
and the traces
26
, or the ground plane
14
and the chip
12
, as shown. A flowable solder layer
32
is deposited on the bottom surface of the leads
24
and the die paddle
18
to provide good electrical, mechanical and thermal coupling.
A moldable material, such as a plastic compound, is injection molded around the integrated circuit chip
12
, the wire bonds
28
and
30
and the lead frame
20
to seal the components and provide a protective cover
36
. The packaging assembly
10
is surface mounted to a circuit board (not shown) including other packaging assemblies to form an electrical system. The solder layer
32
is heated so that solder flows up the sides of the leads
24
to make good electrical connection to the circuit board.
The leads
24
of the lead frame
20
of the packaging assembly
10
shown in
FIG. 1
extend beyond the sides of the protective cover
36
. Thus, the size of the assembly
10
is larger than it needs to be.
FIG. 2
is a cross-sectional view of another known packaging assembly
40
that is a variation of the packaging assembly
10
where like elements are identified by the same reference numeral. In this embodiment, the molding forming the cover
36
has been molded to form straight sides with the leads
24
so that when the solder flows up the side of the leads
24
, it still makes electrical contact thereto.
SUMMARY OF THE INVENTION
In accordance with the teachings of the present invention, a packaging assembly for an integrated circuit is disclosed that eliminates the wire bonds required in the prior art, and provides integrated circuit packaging while the circuit is still in a wafer format. The wafer substrate on which the many integrated circuits have been fabricated is patterned and etched to form signal and power vias through the substrate around an outside periphery of each circuit, and to form ground vias through the substrate beneath the circuits. The combination of a portion of the wafer substrate, the vias and the integrated circuit define an integrated circuit die. Bonding pads are deposited on a top surface and a bottom surface of the wafer substrate that are electrically coupled to the signal vias. A back-side ground plane is provided in electrical contact with the ground vias.
A top protective layer is deposited over all of the integrated circuits, and a photoresist is deposited, patterned and etched on the bottom surface of the wafer substrate so that wafer substrate material can be removed between the dies. A bottom protective layer is then deposited on a bottom surface of the wafer substrate so that it fills the areas between the dies where the substrate material has been removed. The bottom protective layer is then patterned and etched to provide electrical vias therethrough in contact with the back-side metal layer and the signal pads to make electrical contact thereto outside of the packaging assembly. The wafer is then diced along edges of the dies so that the various vias on the sides of the dies are exposed to provide electrical signals to the circuit within the assembly.
Additional advantages and features of the present invention will become apparent from the following description and appended claims, taken in conjunction with the accompanying drawings.


REFERENCES:
patent: 5436412 (1995-07-01), Ahmad et al.
patent: 5579207 (1996-11-01), Hayden et al.
patent: 5741729 (1998-04-01), Selna
patent: 5987732 (1999-11-01), Lee et al.
patent: 6097265 (2000-08-01), Chan et al.
patent: 6137164 (2000-10-01), Yew et al.
patent: 6194669 (2001-02-01), Bjorndahl et al.
patent: 6223439 (2001-05-01), Wonderley
patent: 6459039 (2002-10-01), Bezama et al.
patent: 6521845 (2003-02-01), Barrow
patent: 6632372 (2003-10-01), Chen et al.

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