High-permittivity composite oxide film and uses thereof

Details High-permittivity composite oxide film and uses thereof High-permittivity composite oxide film and uses thereof

1995-11-02

1998-03-31

Speer, Timothy

Stock material or miscellaneous articles

Composite

Of quartz or glass

428428, 428469, 428472, 428701, 428702, B32B 1500

Patent

active

057336610

ABSTRACT:
A composite oxide film which comprises at least one oxide of a metal selected from the group consisting of Al, Ti, Zr, Hf, Nb, and Ta, said oxide containing ions of an organic carboxylic acid salt and/or ions of an inorganic oxoacid salt.

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