High performance, vacuum compatible electromagnetic lens coil

Details High performance, vacuum compatible electromagnetic lens coil High performance, vacuum compatible electromagnetic lens coil

1990-04-10

1991-04-16

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396R, H01F 722

Patent

active

050085492

ABSTRACT:
A high performance, vacuum compatible electromagnetic electron lens coil for electron beam systems has reduced gaseous emissions and improved heat dissipation capability. It comprises a wound coil of electrically conductive wire sheathed in a selected thermoplastic resin insulator. The wire insulator is coated with a hermetic layer of low vapor pressure metal. The low vapor pressure and hermetic sealing properties of the layer provide ultra high vacuum compatibility of the coil. The high thermal conduction property of the layer provides high heat dissipation capability and therefore permits high current densities in the coil.

REFERENCES:
patent: 3743986 (1973-07-01), McInturff et al.
patent: 3983521 (1976-09-01), Furuto et al.
patent: 4078299 (1978-03-01), Furuto et al.
patent: 4329539 (1982-05-01), Tanaka et al.
patent: 4390589 (1983-06-01), Geyling et al.
patent: 4611390 (1986-09-01), Tanaka et al.
patent: 4782316 (1988-11-01), Domeki et al.
patent: 4833362 (1989-05-01), Crewe

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