High performance sol-gel spin-on glass materials

Details High performance sol-gel spin-on glass materials High performance sol-gel spin-on glass materials

2003-07-31

2008-07-01

Koslow, C. Melissa (Department: 1793)

Compositions

Inorganic luminescent compositions with organic...

C106S287160, C528S015000, C528S012000, C528S032000, C528S034000

Reexamination Certificate

active

07393469

ABSTRACT:
Hybrid sol-gel materials are provided, which may be produced by the reaction of an alkyl or dialkyl substituted trialkoxysilane or dialkoxysilane reacting with a silane diol, wherein said alkyl group has from 1 to 8 carbon atoms. A process is also provided for patterning the sol-gel spin-on glass material by: a) coating a substrate with the spin-on glass material; b) exposing the coated substrate of step a) to UV illumination in a desired pattern; c) post-exposure baking the coated substrate of step b) at a temperature from 100° C. to 120° C. for 30 to 60 minutes; d) cooling the coated substrate of step c) to room temperature; e) removing the non-exposed areas of the coating on the coated substrate of step d); f) drying the coated substrate of step e); g) hard baking the coated substrate of step f) at a temperature from 120° C. and 150° C. for 1 to 3 hours.

REFERENCES:
patent: 6818721 (2004-11-01), Zha et al.
patent: 6984483 (2006-01-01), Roscher et al.
patent: WO 01/04186 (2001-01-01), None

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