High performance micromechanical tunable verticle cavity surface

Details High performance micromechanical tunable verticle cavity surface High performance micromechanical tunable verticle cavity surface

1997-01-29

1998-06-23

Bovernick, Rodney B.

Coherent light generators

Particular beam control device

Tuning

372 32, 372 96, G02B 626, G02B 642

Patent

active

057712530

ABSTRACT:
An electrostatically controlled cantilever apparatus for continuous tuning of the resonance wavelength of a Fabry-Perot cavity is disclosed. A resonant cavity is formed between two distributed Bragg reflector (DBR) mirrors each composed of multiple DBR layers. One such layer is replaced with a layer which has been fully oxidized except for a small aperture. This layer provides both optical and current confinement which allows for low threshold currents and high output power.

REFERENCES:
patent: 5629951 (1997-05-01), Chang-Hasnain et al.

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