High performance micromachined valve orifice and seat

Details High performance micromachined valve orifice and seat High performance micromachined valve orifice and seat

1993-02-19

1994-08-02

Rosenthal, Arnold

Valves and valve actuation

Heat or buoyancy motor actuated

2512901, 25368, F16K 3102, F16K 714

Patent

active

053338316

ABSTRACT:
A microminiature valve includes a crystalline substrate having a flow via and a raised valve seat structure. The valve seat structure has a planar bearing surface. The inner edge of the bearing surface defines an orifice to the flow via. The flow via has a varying cross sectional area and is narrowest at the orifice. From both the inner and outer edges of the bearing surface, parallel sloped walls along {111} planes are formed by an anisotropic etch. The microminiature valve has a high ratio of the area of the flow via at the orifice to the area within the outer edges of the valve seat structure.

REFERENCES:
patent: 4007464 (1977-02-01), Bassous et al.
patent: 4169008 (1979-09-01), Kurth
patent: 4581624 (1986-04-01), O'Connor
patent: 4826131 (1989-05-01), Mikkor
patent: 4907748 (1990-03-01), Gardner et al.
patent: 4966646 (1990-10-01), Zdeblick
patent: 5058856 (1991-10-01), Gordon et al.
patent: 5069419 (1991-12-01), Jerman
patent: 5176358 (1993-01-01), Bonne et al.
Sequin, Carlo H., "Computer simulation of anisotropic crystal etching," Sensors and Actuators, A.34 (1992), pp. 225-241.

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