High performance horizontal diffusion furnace system

Details High performance horizontal diffusion furnace system High performance horizontal diffusion furnace system

1995-04-27

1996-05-14

Hoang, Tu

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219405, 373109, 422199, F27B 516

Patent

active

055170013

ABSTRACT:
Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.

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