High performance horizontal diffusion furnace system

Details High performance horizontal diffusion furnace system High performance horizontal diffusion furnace system

1992-06-15

1995-10-24

Hoang, Tu

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219409, 373110, 432122, 118729, F27B 516

Patent

active

054612144

ABSTRACT:
Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.

REFERENCES:
patent: 3098763 (1963-07-01), Deal et al.
patent: 3170016 (1965-02-01), Grace
patent: 3170977 (1965-02-01), Obenchain
patent: 3385921 (1968-05-01), Hampton
patent: 3488044 (1970-01-01), Shepherd
patent: 3811825 (1974-05-01), Enderlein
patent: 3829982 (1974-08-01), Pray et al.
patent: 4246434 (1981-01-01), Gunther et al.
patent: 4292276 (1981-09-01), Enomoto et al.
patent: 4347431 (1982-08-01), Pearce et al.
patent: 4412812 (1983-11-01), Sadowski et al.
patent: 4423516 (1983-12-01), Mellen, Sr.
patent: 4468195 (1984-08-01), Sasaki et al.
patent: 4510609 (1985-04-01), Caslavsky et al.
patent: 4526534 (1985-07-01), Wollmann
patent: 4543059 (1985-08-01), Whang et al.
patent: 4545327 (1985-10-01), Campbell et al.
patent: 4550245 (1985-10-01), Arai et al.
patent: 4692115 (1987-09-01), Aldridge et al.
patent: 4694894 (1987-09-01), Kito et al.
patent: 4702694 (1987-10-01), Johnson et al.
patent: 4745088 (1988-05-01), Inoue et al.
patent: 4747368 (1988-05-01), Brien et al.
patent: 4756091 (1988-07-01), Van Denend
patent: 4802441 (1989-02-01), Waugh
patent: 4849608 (1989-07-01), Muraoka et al.
patent: 4911638 (1990-03-01), Bayne et al.
patent: 4937434 (1990-06-01), Nakao
patent: 4976612 (1990-12-01), Adams
patent: 4979464 (1990-12-01), Kunze-Concewitz et al.
patent: 5001327 (1991-03-01), Hirasawa et al.
patent: 5072094 (1991-12-01), Foster et al.
patent: 5080039 (1992-01-01), Kanegae et al.
patent: 5097890 (1992-03-01), Nakao
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5174045 (1992-12-01), Thompson et al.
patent: 5178534 (1993-01-01), Bayne et al.
patent: 5259881 (1993-11-01), Edwards et al.

Affiliated with

Also associated with

Rating

High performance horizontal diffusion furnace system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High performance horizontal diffusion furnace system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High performance horizontal diffusion furnace system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1888232