High performance diode-implanted voltage-controlled poly...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

Reexamination Certificate

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C257S359000

Reexamination Certificate

active

07148556

ABSTRACT:
A p-type polysilicon resistor formed in the inter-level dielectric layer contains an implanted diode. A positive voltage applied to the diode modulates the depletion region of the diode and changes the absolute resistance of the p-type polysilicon resistor. This modulation occurs not only horizontally, but also vertically. The fact that the tunable resistor is a p-type polysilicon resistor means that this structure can easily be integrated into the process since polysilicon is used as a gate material for basic CMOS processing.

REFERENCES:
patent: 4849344 (1989-07-01), Desbiens et al.
patent: 5739577 (1998-04-01), Tuttle
patent: 6984869 (2006-01-01), Erickson et al.
patent: 2005/0116301 (2005-06-01), Shaw et al.

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