Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2010-04-05
2010-12-14
Dinh, Jack (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S237000
Reexamination Certificate
active
07852543
ABSTRACT:
An electro-optic device with a doped semiconductor base and a plurality of pixels on the semiconductor base. Pixels include oppositely doped semiconductor layer and a top electrode formed on the oppositely doped semiconductor layer. The top electrode has a grid pattern with at least one busbar and a plurality of fingers extending from the busbar, and spacing between the fingers decreases with distance from the bondpad along the busbar. Each pixel can also include a multiple quantum well formed on the semiconductor base. The top electrode shape produces an approximately uniform lateral resistance in the pixel. An embodiment is a large area modulator for modulating retro-reflector systems, which typically use large area surface-normal modulators with large lateral current flow. Uniform resistance to each part of the modulator decreases location dependence of frequency response. A chirped grid electrode balances semiconductor sheet resistance and metal line resistance components of the series resistance.
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Goetz Peter G.
Rabinovich William S
Dinh Jack
Ferrett Sally A.
Ressing Amy L.
The United States of America as represented by the Secretary of
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