High penetration deposition process and apparatus

Details High penetration deposition process and apparatus High penetration deposition process and apparatus

1988-11-25

1990-06-05

Silverman, Stanley

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427238, 427294, B05B 306

Patent

active

049313061

ABSTRACT:
A method and apparatus for deep penetration deposition of material in a porous substrate utilizes a pressure differential across the substrate to effect penetration of arc-produced vapor from one chamber through the body. The one chamber can be held at a pressure of 10.sup.-2 to 10.sup.-3 torr while the other chamber is at a pressure of 10.sup.-5 to 10.sup.-6 torr.

REFERENCES:
patent: 3669721 (1972-06-01), Jager
patent: 4440808 (1984-04-01), Mitter
patent: 4545327 (1985-10-01), Campbell et al.
patent: 4620991 (1986-11-01), Young
patent: 4826704 (1989-05-01), Walser

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