High ortho-ortho bonded novolak binder resins and their use in r

Details High ortho-ortho bonded novolak binder resins and their use in r High ortho-ortho bonded novolak binder resins and their use in r

1993-05-07

1995-05-09

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Composition or product which contains radiation sensitive...

430191, 430192, 430193, 525480, 525501, 528155, 528156, G03F 7023

Patent

active

054138949

ABSTRACT:
A phenolic novolak composition prepared by a process comprising the steps of:

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Templeton et al. "On the Dissolution Kinetics of Positive Photoresists-The Secondary Structure Model", SPIE vol. 771, Advances in Resist Technology & Processing IV (1987) pp. 136-147.
Hanabata et al. "High Resolution Positive Photoresists", SPIE vol. 631, Advances in Resist Technology and Processing III (1986).

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