High numerical aperture catadioptric objectives without...

Details High numerical aperture catadioptric objectives without... High numerical aperture catadioptric objectives without...

2009-04-07

2011-11-22

Dinh, Jack (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C359S726000, C359S733000, C359S900000

Reexamination Certificate

active

08064148

ABSTRACT:
Disclosed are high numerical (NA) catadioptric objectives without a central obscuration, and applications thereof. Such objectives can operate through a wide spectral bandwidth of radiation, including deep ultraviolet (DUV) radiation. Importantly, refractive elements in the catadioptric objectives can be manufactured from a single type of material (such as, for example, CaF2and/or fused silica). In addition, the elements of such catadioptric objectives are rotationally symmetric about an optical axis. The catadioptric objectives eliminate the central obscuration by (1) using a polarized beamsplitter (which passes radiation of a first polarization and reflects radiation of a second polarization), and/or (2) using one or more folding mirrors to direct off-axis radiation into the pupil of the catadioptric objective. An example catadioptric objective is shown in FIG.2.

REFERENCES:
patent: 5717518 (1998-02-01), Shafer et al.
patent: 5999310 (1999-12-01), Shafer et al.
patent: 6064517 (2000-05-01), Chuang et al.
patent: 6108140 (2000-08-01), Hashimoto et al.
patent: 6208473 (2001-03-01), Omura
patent: 6229647 (2001-05-01), Takahashi et al.
patent: 7035001 (2006-04-01), Chuang et al.
patent: 7136234 (2006-11-01), Shafer et al.
patent: 7180658 (2007-02-01), Shafer et al.
patent: 7245438 (2007-07-01), Chuang et al.
patent: 7351980 (2008-04-01), Lange

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