High numerical aperture and long working distance objective syst

Optical: systems and elements – Diffraction – From zone plate

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359571, 359656, G02B 518, G02B 308, G02B 2102

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active

057483728

ABSTRACT:
The invention provides a high-magnification and high-NA objective having a long working distance, which is corrected for various aberrations, especially chromatic aberrations over a wide wavelength range and allowed to have an aligning pupil position without making much use of cemented lenses and anomalous dispersion glass. The objective comprises a first lens group G1 including a meniscus lens concave on the object side and having a positive power as a whole, two optical elements of the diffraction type (DOEs), and a second lens group G2 including at least one cemented lens, and satisfies the condition for ensuring the edge thickness of the front lens as well as either one of two conditions for making effective correction for longitudinal chromatic aberration and chromatic aberration of magnification.

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