High NA system for multiple mode imaging

Details High NA system for multiple mode imaging High NA system for multiple mode imaging

2006-04-25

2006-04-25

Nguyen, Thong Q (Department: 2872)

Optical: systems and elements

Compound lens system

With curved reflective imaging element

C359S357000, C359S726000

Reexamination Certificate

active

07035001

ABSTRACT:
A system for multiple mode imaging is disclosed. The catadioptric system has an NA greater than 0.65, and preferably greater than 0.9, highly corrected for low and high order monochromatic aberrations. The system employs unique illumination entrances and optics to collect reflected, diffracted, and scattered light over a range of angles. Multiple imaging modes are possible by varying the illumination geometry and apertures at the pupil plane. Illumination can enter the catadioptric optical sytems using an auxiliary beamsplitter or mirror, or through the catadioptric elements at any angle from 0 to 85 degrees from vertical. The system may employ a relayed pupil plane, used to select different imaging modes, provide simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.

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