Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent
1998-03-24
2000-05-16
Henry, Jon
Optical: systems and elements
Compound lens system
With curved reflective imaging element
359387, 359351, 359727, 359730, G02B 1708, G02B 2110
Patent
active
060645172
ABSTRACT:
A system for multiple mode imaging is disclosed herein. The system is a catadioptric system preferably having an NA greater than 0.9, highly corrected for low and high order monochromatic aberrations. This system uses unique illumination entrances and can collect reflected, diffracted, and scattered light over a range of angles. The system includes a catadioptric group, focusing optics group, and tube lens group. The catadioptric group includes a focusing mirror and a refractive lens/mirror element. The focusing optics group is proximate to an intermediate image, and corrects for aberrations from the catadioptric group, especially high order spherical aberration and coma. The tube lens group forms the magnified image. Different tube lens groups can be used to obtain different magnifications, such as a varifocal tube lens group to continuously change magnifications from 20 to 200.times.. Multiple imaging modes are possible by varying the illumination geometry and apertures at the pupil plane. Imaging modes include bright-field, full sky, ring dark-field, inverted ring dark-field, directional dark-field, double dark-field, Manhattan geometry, confocal bright-field, confocal dark-field, conoscopic, etc. Illumination can enter the catadioptric optical system using an auxiliary beamsplitter or mirror, or through the catadioptric group at any angle from 0 to 85 degrees from vertical. Multiple beams at multiple angles may be used for illumination. The high NA catadioptric system can also have a relayed pupil plane, used to select different imaging modes, providing simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.
REFERENCES:
patent: 1973066 (1934-09-01), Hauser et al.
patent: 2661658 (1953-12-01), Dyson
patent: 4758088 (1988-07-01), Doyle
patent: 4898471 (1990-02-01), Stonestrom
patent: 4974094 (1990-11-01), Morito
patent: 5031976 (1991-07-01), Shafer
patent: 5177559 (1993-01-01), Batchelder
patent: 5428442 (1995-06-01), Lin
patent: 5488229 (1996-01-01), Elliott
patent: 5717518 (1998-02-01), Shafer
M. R. Bartz et al, "Led Print Analyzer", IBM Technical Disclosure Bulletin, vol. 14, No. 3, Aug. 1971.
D. S. Goodman, "Darkfield Illuminator Attachment", IBM Technical Disclosure Bulletin, vol. 27, No. 5, Oct. 1984.
Armstrong J. Joseph
Chuang Yung-Ho
Shafer David
Tsai Bin-Ming B.
Henry Jon
Kla-Tencor Corporation
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