High NA large-field unit-magnification projection optical...

Details High NA large-field unit-magnification projection optical... High NA large-field unit-magnification projection optical...

2006-10-03

2006-10-03

Spector, David N. (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C355S053000

Reexamination Certificate

active

07116496

ABSTRACT:
An optical system for projection photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a large field over both a narrow and a broad spectral range. The optical system includes a positive lens group having a positive subgroup of elements that includes at least a plano-convex element and a negative subgroup that includes at least a negative meniscus element. The lens subgroups are separated by a small air space. The positive and negative subgroups constitute a main lens group arranged adjacent to but spaced apart from a concave mirror along the mirror axis. The system also includes a variable aperture stop so that the system has a variable NA. A projection photolithography system that employs the optical system is also disclosed.

REFERENCES:
patent: 4103989 (1978-08-01), Rosin
patent: 4171870 (1979-10-01), Bruning et al.
patent: 4391494 (1983-07-01), Hershel
patent: 4425037 (1984-01-01), Hershel et al.
patent: 4964705 (1990-10-01), Markle
patent: 5031977 (1991-07-01), Gibson
patent: 5040882 (1991-08-01), Markle
patent: 5161062 (1992-11-01), Shafer et al.
patent: 5559629 (1996-09-01), Sheets et al.
patent: 5805356 (1998-09-01), Chiba
patent: 6813098 (2004-11-01), Mercado

Affiliated with

Also associated with

Rating

High NA large-field unit-magnification projection optical... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High NA large-field unit-magnification projection optical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High NA large-field unit-magnification projection optical... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3688044