High light-transmissive dust-proof body and method of preparing

Details High light-transmissive dust-proof body and method of preparing High light-transmissive dust-proof body and method of preparing

1989-12-12

1993-09-21

Sluby, P. C.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

428336, 428702, 427165, 427167, 501 12, 501 53, 501133, B32B 702

Patent

active

052467678

ABSTRACT:
A high light-transmissive dust-proof body equipped with a holding frame to be mounted on a mask substrate and a transparent light-transmissive film mounted on the holding frame, wherein the light-transmissive film comprises an inorganic film having a thickness of 0.2 .mu.m to less than 10 .mu.m and transmitting light having wavelengths of 240 to 500 nm at an average light transmittance of at least 85%, wherein the light-transmissive film forms (i) a three-layer structure of a low refractive index layer/high refractive index layer/base layer, or (ii) a five-layer structure comprising a low refractive index layer/high refractive index layer/base layer/high refractive index layer/low refractive index layer, the high refractive index layer being an inorganic layer and the low refractive index layer being an organic polymer.

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