High isolation tunable MEMS capacitive switch

Details High isolation tunable MEMS capacitive switch High isolation tunable MEMS capacitive switch

2007-09-04

2009-06-02

Takaoka, Dean O (Department: 2817)

Wave transmission lines and networks

Long line elements and components

Switch

C333S105000

Reexamination Certificate

active

07541898

ABSTRACT:
The systems and methods described herein provide for a radio frequency micro-electromechanical systems switch having two or more resonant frequencies. The switch can be configured as a capacitive shunt switch having a deflectable member coupled between two electrodes over a transmission line. A first insulator can be located between one of the electrodes and the deflectable member to form a capacitive element. The deflectable member can be deflectable between an up-state and a down-state, the down-state capacitively coupling the deflectable member with the transmission line. The degree by which the deflectable member overlaps the first insulator can be adjusted to adjust the capacitance of the capacitive element and the resulting resonant frequency.

REFERENCES:
patent: 6639488 (2003-10-01), Deligianni et al.
patent: 7265647 (2007-09-01), Qian et al.
Muldavin et al., “High Isolation CPW MEMS Shunt Switches—Part 2: Design”, IEEE Transactions on Microwave Theory and Techniques, vol. 48, No. 6, Jun. 2000, pp. 1053-1056.
Qian et al., “RF MEMS Asymmetric Capacitive Switch with High-Isolation at Selected Low-Microwave Frequency”, Microwave and Optical Technology Letters, vol. 49, No. 3, Mar. 2007, pp. 702-706.

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