Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-04-22
2008-12-09
Thompson, Timothy J (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C359S223100, C345S076000, C345S082000
Reexamination Certificate
active
07463403
ABSTRACT:
A driver is provided for use with a MEMS device. Generally, the driver includes: (i) a high voltage circuit electrically coupled to a movable actuator of the MEMS to apply a HV pulse thereto; and (ii) a charge control circuit coupled to a base electrode formed in a substrate underlying the actuator to control a potential applied to the base electrode. The charge control circuit can include a capacitance divider having a plate capacitor defined by the actuator and the base electrode, and a charge storage capacitor electrically coupled to the base electrode and in series with the plate capacitor. The charge storage capacitor can include a variable, voltage controlled capacitor, the capacitance of which is controlled by an input signal or voltage to the driver. Other embodiments are also disclosed.
REFERENCES:
patent: 6441449 (2002-08-01), Xu et al.
patent: 6683591 (2004-01-01), Hashimoto et al.
patent: 7102808 (2006-09-01), Kasai
patent: 2005/0237743 (2005-10-01), Payne et al.
patent: 2008/0093688 (2008-04-01), Cummings et al.
Berger Josef
Gaalema Stephen
Payne Alexander
Webb Douglas
Nuttle William E.
Silicon Light Machines Corporation
Thompson Timothy J
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