Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent
1990-03-15
1991-08-13
Coe, Philip R.
Cleaning and liquid contact with solids
Apparatus
With movable means to cause fluid motion
134 1, 134902, B08B 312
Patent
active
050388088
ABSTRACT:
A high frequency ultrasonic system for sonically removing particles from substrates or wafers held in a carrier or carriers in a tank of liquid, such as DI water. A frame encompasses the tank and supports the transducer housing at an angle with respect to the tank bottom and also provides for horizontal movement between the sides of the tank. A transducer housing supports at least one transducer within the transducer housing. The transducer housing can be supported and moved at an angle with respect to the tank bottom.
REFERENCES:
patent: 3001769 (1961-09-01), Plassmeyer
patent: 3240963 (1966-03-01), Sasaki
patent: 3573983 (1971-04-01), Antonevich
patent: 3893869 (1975-07-01), Mayer et al.
patent: 4118649 (1978-10-01), Schwartzman et al.
patent: 4326553 (1982-04-01), Hall
patent: 4401131 (1983-08-01), Lawson
patent: 4543130 (1985-09-01), Schwartzman
patent: 4602184 (1986-07-01), Meitzler
patent: 4705054 (1987-11-01), Fields
patent: 4736759 (1988-04-01), Coberly et al.
patent: 4736760 (1988-04-01), Coberly et al.
patent: 4804007 (1989-02-01), Bran
patent: 4854337 (1989-08-01), Bunkenburg et al.
patent: 4869278 (1989-09-01), Bran
Hammond Peter
Schumacher Kevin S.
Coe Philip R.
Jaeger Hugh D.
S&K Products International, Inc.
LandOfFree
High frequency ultrasonic system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High frequency ultrasonic system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High frequency ultrasonic system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1520964