High-frequency switch and integrated high-frequency switch array

Wave transmission lines and networks – Plural channel systems – Having branched circuits

Patent

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Details

200181, 333161, 333262, H01P 110

Patent

active

061338079

ABSTRACT:
A high-frequency switch includes a substrate, external conductors provided on the substrate, and a central conductor provided on the substrate, the external conductors and the central conductor constituting a coplanar high-frequency wave line on the substrate. A deflectable air-bridge is held on the external conductors via an air gap and extends out over the central conductor, the air-bridge being deflectable by an electrostatic field created by an actuation voltage applied between the wave line and the air-bridge. A control-signal conductor generates the actuation voltage between the wave line and the air-bridge. The central conductor acts as the control-signal conductor which generates the actuation voltage between the wave line and the air-bridge. The air-bridge contains a plurality of laminated thin films, the laminated thin films having variable internal stresses that are adjustable to match a particular actuation voltage selected for the switch.

REFERENCES:
patent: 5121089 (1992-06-01), Larson
patent: 5268696 (1993-12-01), Buck et al.
patent: 5619061 (1997-04-01), Goldsmith et al.
patent: 5638946 (1997-06-01), Zavracky

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