Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2008-08-14
2009-11-10
Budd, Mark (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S31300R
Reexamination Certificate
active
07615910
ABSTRACT:
The present invention relates to a high frequency surface acoustic wave device, which may be manufactured by the same manufacturing equipment, and with the same material, as those required for manufacturing a low frequency surface acoustic wave device. The disclosed high frequency surface acoustic wave device comprises: a piezoelectric substrate; a high acoustic velocity layer formed on the surface of the piezoelectric substrate whose acoustic velocity of the surface acoustic wave is larger than 5000 m/sec; an input transducing part; and an output transducing part; wherein the input transducing part and the output transducing part are formed in pair on or below the surface of the high acoustic velocity layer. Besides, the high acoustic velocity layer is preferably made of aluminum oxide, and formed on the surface of the piezoelectric substrate by an electron-beam evaporation process. The thickness thereof is preferably between 2 μm and 20 μm.
REFERENCES:
patent: 3965444 (1976-06-01), Willingham et al.
patent: 4194171 (1980-03-01), Jelks
patent: 4243960 (1981-01-01), White et al.
patent: 4342012 (1982-07-01), Inaba et al.
patent: 5446329 (1995-08-01), Nakahata et al.
Huang Rui-Cheng
Shih Wen-Ching
Bacon & Thomas PLLC
Budd Mark
Tatung Company
Tatung University
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