Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device
Patent
1995-12-01
1997-06-17
Mintel, William
Active solid-state devices (e.g., transistors, solid-state diode
Heterojunction device
257197, 257198, H01L 310328, H01L 310336, H01L 31072, H01L 31109
Patent
active
056400250
ABSTRACT:
A high frequency transistor including a heavily doped first current carrying layer positioned on a substrate and a semi-insulating layer of LTGaAs epitaxially grown on the first layer. The semi-insulating layer is etched, using a layer of AlAs as an etch stop, to define an active region and a first current carrying electrode is grown on the exposed first layer in the active region. A control layer is grown on the semi-insulating layer and the first current carrying electrode, and a second current carrying electrode is grown on the control layer. External contacts are formed on the first current carrying layer, the control layer, and the second current carrying electrode.
Hashemi Majid M.
Tehrani Saied N.
Mintel William
Motorola
Parsons Eugene A.
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