Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1983-05-26
1985-05-14
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310364, 310369, 310312, H01L 4108
Patent
active
045174857
ABSTRACT:
The high-frequency piezoelectric resonator comprises a quartz plate or disk having a region of reduced thickness which forms a diaphragm and is joined to the remainder of the plate or disk by means of a zone forming a step. A conductive electrode extends from the exterior of the disk or plate to the center of the thinned region and is provided with a conductive tongue constituted by a metallic film-layer of controlled thickness and disposed in the stepped zone. The method involves formation of the disk or plate by ion machining whereas the electrodes and the conductive tongue are formed by the sputtering technique.
REFERENCES:
patent: 2095376 (1937-10-01), Bechmann
patent: 2510811 (1950-06-01), Gale
patent: 3222622 (1965-12-01), Curran et al.
patent: 3396287 (1968-08-01), Horton
patent: 3694677 (1972-09-01), Guttwein et al.
patent: 3721841 (1973-03-01), Wilson
patent: 3940638 (1976-02-01), Teryama
patent: 4339683 (1982-07-01), Scott et al.
Berte Marc
Bidard Louis
Lechopier Serge
Budd Mark O.
Compagnie d'Electronique et de Piezo-Electricite
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