High-frequency oscillator for an integrated semiconductor...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated...

Reexamination Certificate

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C257S604000, C438S218000, C438S294000, C438S353000

Reexamination Certificate

active

06909163

ABSTRACT:
A high frequency oscillator for an integrated semiconductor circuit is a component of the semiconductor circuit, which is comprised of a first silicon layer, an adjoining silicon dioxide layer (insulation layer), and an additional subsequent silicon layer (structured layer), (SOI wafer), wherein the high frequency oscillator is comprised of a resonator with a metallized cylinder made of silicon disposed in the structured layer and a coupling disk that overlaps the cylinder in the vicinity of the layer, and an IMPATT diode that is connected to the cylinder of the resonator via a recess in the coupling disk.

REFERENCES:
patent: 4992763 (1991-02-01), Bert
patent: 2002/0171115 (2002-11-01), Nakatani
Langer, D.: “An Integrated MMW Radar System . . . ”, Proceedings of the 1996 International Conference on Robotics and Automation. Minneapolis, Apr. 22-28, 1996, Proceedings of the International Conference on Robotics and Automation, New York, IEEE, US BD. 1 CONF. 13, Apr. 22, 1996, pp. 417-422.
Lyons C., et al: “A Low-Cost MMIC Based Radar . . . ”, Intelligent Vehicles Symposium 2000. IV 2000. Proceedings of the IEEE Dearborn, MI USA Oct. 3-5, 2000, Piscataway, NJ, USA, IEEE, US Oct. 3, 2000, pp. 688-693.
Sattler S et al: “A Coplanar Millimeterwave Resonator on Silicon” Microwave and Millimeter-Wave Monolithic Circuits Symposium, 1993, Digest of Papers, IEEE 1993 Atlanta, GA USA 14-15, Jun. 14, 1993, pp. 57-60.

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