High frequency, large current, switch including a pressure-actua

Electricity: circuit makers and breakers – Fluid pressure – Diaphragm

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Details

73729, 200 83N, H01H 3532

Patent

active

050878000

ABSTRACT:
The invention concerns an on-off switch (1) for high-frequency currents. This switch (1) comprises a housing (2) made of an electrically non-conducting plastic and sealed at both its upper and its lower sides by electrically conducting contact parts (3,4). A metal bellows (14) is present in the housing (2) and is connected at one end to one of the contact parts, (4) and at its other end to a contact head (25). Using compressed air, the contact head (25) can be moved to make contact with the other contact part (3) or be removed away from it.

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W. van den Hoek et al., "Power Loss Mechanisms in Radio Frequency Dry Etching Systems", J. Vac. Sci. Technol. B 5 May/Jun. 1987, pp. 647-651.
F. Vratny, "Deposition of Tantalum and Tantalum Oxide by Superimposed RF and D-C Sputtering", J. Electrochem Soc. Solid-State Science (May 1967), pp. 505-508.

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